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** Course Overview Handout in PDF **
Please note that this schedule is subject to change.
| Date | Topic | Lecturer | Assignments Out | Assignments Due | Lab |
| W 2/2 | Overview/Safety/Lab | AIA | |||
| M 2/7 | IC Lab Overview / CIM | AIA | IC-1: Gate ox/poly | ||
| W 2/9 | Vacuum Systems | RCO | PS #1 (RCO) | IC-1: Gate ox/poly | |
| M 2/14 | CVD | RCO | |||
| W 2/16 | Oxidation | RCO | PS #2 (RCO) | PS #1 (RCO) | |
| T 2/22 | Diffusion, Part I | RCO | IC-2: Photo/Etch | ||
| W 2/23 | Diffusion, Part II | RCO | PS #3 (RCO) | PS #2 (RCO) | IC-2: Photo/Etch |
| M 2/28 | IC Testing / CIM | RCO | Lab 1 Report | IC-3: Test | |
| W 3/2 | Lithography | AIA | PS #4 (AIA) | PS #3 (RCO) | IC-3: Test |
| M 3/7 | MEMS Introduction | AIA | MEMS-1: Backside | ||
| W 3/9 | Quiz #1 | Staff | LAB 1T Report 3/11 | MEMS-1: Backside | |
| M 3/14 | Soft Lithography | AIA | PS #5 (AIA) | PS #4 (AIA) | MEMS-2: KOH Etch |
| W 3/16 | Dry Etching | AIA | MEMS-2: KOH Etch | ||
| M 3/22 | Spring Break | ||||
| W 3/24 | Spring Break | ||||
| M 3/28 | MEMS Lab Test / CIM | AIA; | Lab 2 Report | PS #5 (AIA) | MEMS-3: Test |
| W 3/30 | Dry/Wet Etch | AIA | Lab 1W Report | MEMS-3: Test | |
| M 4/4 | Interconnects | AIA | No Lab | ||
| W 4/6 | Sputter Deposition | RCO | PS #6 (AIA) | Lab 2 Report 4/8 | |
| M 4/11 | Fluids Lab Overview | AIA | FLUIDS-1: Photo | ||
| W 4/13 | Evaporation | RCO | PS #6 (AIA) | FLUIDS-1: Photo | |
| M 4/18 | Patriots Day | ||||
| W 4/20 | Quiz #2 | Staff | PS #7 (RCO) | ||
| M 4/25 | CMP / Electrodeposition | RCO | FLUIDS-2: Molding | ||
| W 4/27 | Bulk Crystal Growth | RCO | Take Home Quiz | PS #7 (RCO) | FLUIDS-2: Molding |
| M 5/2 | Fluids Testing | AIA | Lab 3 Report | FLUIDS-3: Test | |
| W 5/4 | Special Topics I | RCO | Take Home Quiz | FLUIDS-3: Test | |
| M 5/9 | Special Topics II | ||||
| W 5/11 | Special Topics III | Lab 3 Report 5/12 |