PROBLEM SETS:

There will be approximately 7 homework sets during the semester. The homework sets will be due approximately one week after being issued. We strongly encourage students to work in teams with one set of solutions submitted by each team. As soon as possible, you should set up a homework team consisting of no more than four members. All team members must sign the completed solution and the final draft authors should be clearly identified at the beginning of the solution. Your signature is your bond that you have contributed significantly to the solutions.

Of course, "teamwork" does not apply to the lab reports..... Everyone must try to write those themselves !

PROBLEM SET SCHEDULE (Tentative)

PROBLEM SET PDF'S	DATE OUT	DATE DUE	TOPIC	SOLUTIONS (PDF)
1	2/9	2/16	Gas Kinetics, CVD	1
2	2/16	2/23	Oxidation	2
3	2/23	3/2	Diffusion, Ion Implant	3
Lab 1 Technical	2/28	3/11	MOS Capacitor
Lab 1 Writing	2/28	3/30	MOS Capacitor
4	3/2	3/14	Litho	4
5	3/16	4/1	Etching	5
Lab 2	3/28	4/8	MEMS Cantilever
6	4/6	4/13	Interconnects	6
7	4/20	4/27	PVD
Lab 3	5/2	5/12	Fluids