Device Overview Supplementary Notes

1. MOS Capacitor

 

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Class Lecture Supplemental Notes

1. X-ray nitride mask paper: by Sekimoto (J. Vac Sci)
2. Nanolithography paper #1: by Chou (Applied Phys. Letters)
3. Nanolithography paper #2: by Chou (Science Magazine)
4. Soft Lithography paper: by Whitesides (Angewandte Chemie)
5. Micro-Fluidics paper: by Santini (Nature)