Date	Lecture #	Topic
W 2/2	Lecture 1	Overview/Safety/Lab
M 2/7	Lecture 2	IC Lab Overview / CIM
W 2/9	Lecture 3 Preview	Vacuum Systems Preview
W 2/9	Lecture 3	Vacuum Systems
M 2/14	Lecture 4 Preview	CVD Preview
M 2/14	Lecture 4	CVD
W 2/16	Lecture 5 Preview	Oxidation Preview
W 2/16	Lecture 5	Oxidation
T 2/22	Lecture 6 & 7 Preview	Diffusion Preview
T 2/22	Lecture 6	Diffusion, Part I: Basics
W 2/23	Lecture 7	Diffusion, Part II: Ion Implantation
M 2/28	Lecture 8	IC Testing
M 2/28	Lecture 8	CIM
W 3/2	Lecture 9	Lithography Basics
M 3/7	Lecture 10	MEMS Introduction
W 3/9	Quiz #1
M 3/14	Lecture 11	Photoresists and Advanced Lithography
W 3/16	Lecture 12	Etch and Pattern Transfer I
M 3/22	Spring Break	- No Classes
W 3/24	Spring Break	- No Classes
M 3/28	Lecture 13	MEMS Lab Test
W 3/30	Lecture 14	Etch and Pattern Transfer II
M 4/4	Lecture 15	Interconnects
W 4/6	Lecture 16	Physical Vapor Deposition
M 4/11	Lecture 17	Fluids Lab Overview
W 4/13	Lecture 18	Evaporation
M 4/18	Patriots Day	- No Classes
W 4/20	Quiz #2
M 4/25	Lecture 19	Electrodeposition
W 4/27	Lecture 20	Bulk Crystal Growth
M 5/2	Lecture 21	Fluidics Testing
W 5/4	Lecture 22	Special Topics I
M 5/9	Lecture 23	Special Topics II
W 5/11	Lecture 24	Special Topics III
R 5/12	Lab 3 REPORT DUE