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This course has a three part laboratory section, in which students study fabrication techniques of silicon electronic devices or microstructures. In the laboratory section of this course, we will be fabricating several structures, including poly-silicon NMOS capacitors, MEMS micro-cantilevers, and MEMS microfluidic channels, in which one will be able to observe the interrelationship between material properties, electrical behavior, and the device fabrication techniques.
Laboratory sessions will begin in the week of February 7-11, 2005, and continue until the end of the semester. Students will spend approximately one four-hour laboratory session per week for 9 weeks. At that time, the device structures will have been fabricated and the rest of the lab time will be spent on material and electrical characterization.
LABORATORY GROUPS
Laboratory groups will consist of six students who
will meet at 9 assigned times during the semester.
|
GROUP
|
MEETING DAY
|
MEETING TIME
|
|
A
|
Tuesday
|
9-1
|
|
B
|
Tuesday
|
1-5
|
|
C
|
Thursday
|
9-1
|
|
D
|
Thursday
|
1-5
|
|
E
|
Friday
|
9-1
|
|
F
|
Friday
|
1-5
|
LABORATORY SCHEDULE
| M | T | W | Th | F | ||
| February | 7-11 | AB(1) | CD(1) | EF(1) | ||
| 21-25 | ---------- | CD(2) | EF(2) | |||
| 28-March 4 | AB(2),(3) | CD(3) | EF(3) | |||
| March | 7-11 | AB(4) | CD(4) | EF(4) | ||
| 14-18 | AB(5) | CD(5) | EF(5) | |||
| 28-April 1 | AB(6) | CD(6) | EF(6) | |||
| April | 11-15 | AB(7) | CD(7) | EF(7) | ||
| 25-29 | AB(8) | CD(8) | EF(8) | |||
| May | 2-6 | AB(9) | CD(9) | EF(9) |
LABORATORY SESSIONS
|
Laboratory Session
|
Topic |
|
1
|
MOS Capacitor: Gate / poly deposition |
|
2
|
MOS Capacitor: Backside etch |
|
3
|
MOS Capacitor: Gate etch and Testing |
|
4
|
MEMS Micro-cantilever: Nitride hardmask deposition and patterning |
|
5
|
MEMS Micro-cantilever: Cantilever release using KOH etch |
|
6
|
MEMS Micro-cantilever: Testing |
|
7
|
Microfluidic Channel: Photo |
|
8
|
Microfluidic Channel: Molding |
|
9
|
Microfluidic Channel: Testing |
About the lab itself...
1. SOPs for machines in ICL and TRL
2. Lab uesr's responsibilities
3. All about MTL
MOSCAP Lab Manuals and Goodies
1a. Lab Manual for the MOS Capacitor sessions
1b. Nikon stepper mask schematics for the MOS Capacitor
1c. Oxide growth and sheet resistivity data for silicon... very useful !
1d. Lab 1 Writeup Report format - for the CIM credit...
1e. Lab 1 Grading Guide from Thea
1f. MOSCAP Lab Calculation Notes (By Andy Fan)
MEMS Cantilever Lab Manuals and Goodies
2a. Lab Manual for the MEMS Cantilever sessions
2b. Contact mask schematics for the MEMS Cantilever
2c. MEMS Lab Calculation Notes (By Andy Fan)
MEMS Microfluidic Channel Lab Manuals and Goodies
3a. Lab Manual for the MEMS Microfluidic Channel Lab sessions
3b. Fluidics Lab Calculation Notes (By Andy Fan)