6.152J / 3.155J is an introductory subject to microelectronics processing technology and microfabrication.

Topics discussed include:

Substrate Modification
Crystal Growth, Diffusion, Oxidation, Ion Implantation, Epitaxy, Molecular Beam Epitaxy (MBE)

Thin Film Deposition
Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD)

Pattern Definition & Transfer
Lithography (Photo, e-beam & Ion), Etching (CMP) and Lift-off

Other Topics
Interconnects & Contacts, Process Integration and Process Simulation

Statement of Objectives and Outcomes

Please fill out the Course Assessment survey which can be downloaded and return to 39-553

6.152J / 3.155J Course Assessment Survey

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